发明名称 ALKOXYSILANE COMPOUND AND PHOTOSENSITIVE RESIN COMPOSITION
摘要 PROBLEM TO BE SOLVED: To obtain both an adhesive composition having high adhesion to a substrate and capable of exhibiting good patterning performances without problems such as deposition and a heat-resistant photosensitive resin composition using the adhesive. SOLUTION: The alkoxysilane compound is represented by formula (1) (wherein, R1, R2, R'1 and R'2 are each a 1-10C alkyl group; (m) is an integer of 0-2; R3 and R'3 are each a bivalent organic group; and R4 is a bivalent organic group containing an aromatic group).
申请公布号 JP2002179688(A) 申请公布日期 2002.06.26
申请号 JP20000382530 申请日期 2000.12.15
申请人 ASAHI KASEI CORP 发明人 KANETANI RYUICHIRO;KIMURA MASASHI
分类号 G03F7/075;C07F7/18;C08F2/44;C08F2/46;C08F290/14;C08K5/544;C08L101/00;G03F7/085;H01L21/027 主分类号 G03F7/075
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