,申请号JP19950178064-传众专利搜索

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发明名称
摘要
申请公布号	JP3296148(B2)	申请公布日期	2002.06.24
申请号	JP19950178064	申请日期	1995.06.20
申请人		发明人
分类号	B24B1/00;H01L21/02;H01L21/205;H01L21/304;(IPC1-7):H01L21/304	主分类号	B24B1/00
代理机构		代理人
主权项
地址

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