发明名称 PHOTOSENSITIVE RESIN LAMINATE
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive resin laminate, in which the buried slit depth of relief is decreased and the thin line width is not more increased than that of a negative film. SOLUTION: In the photosensitive resin laminate formed by providing at least a substrate, a photosensitive resin layer, a slip coat layer and a cover layer, the cover layer is a mat cover film having surface roughness (Ra) of 0.20-0.50 in the side facing the slip coat layer and the photosensitive resin layer has a multilayer structure compound of at least two layers.
申请公布号 JP2002174905(A) 申请公布日期 2002.06.21
申请号 JP20000375004 申请日期 2000.12.08
申请人 TOYOBO CO LTD 发明人 TAGUCHI YUJI;MOTOI KEIICHI
分类号 G03F7/11;G03F7/00;G03F7/095 主分类号 G03F7/11
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