APPARATUS FOR IDENTIFYING WAFER NUMBER

摘要

PURPOSE: An apparatus for identifying a wafer number is provided to confirm an identification number of a particular wafer by elevating the particular wafer to a predetermined position. CONSTITUTION: An elevation portion(20) is formed in an inside of a cartridge(10). A multitude of slot(11) is formed in a predetermined interval on inner sides of the cartridge(10). A multitude of wafer(30) is loaded between the slots(11). A guide portion(12) is formed at one side of the cartridge(10). The guide portion(12) has a predetermined height and a predetermined width in order to sense an identification number of the wafer(30). The guide portion(12) is formed between the slots(11). The elevation portion(20) is used for elevating the wafer(30). The elevation portion(20) is contacted with a bottom face of the cartridge(10). The wafer(30) is loaded on the elevation portion(20).