ALIGNMENT FOR ORGANIC LIGHT EMITTING DEVICE MANUFACTURING EQUIPMENT

摘要

PURPOSE: An alignment for an organic light emitting device manufacturing equipment is provided to perform a continuous process by one alignment device by loading and conveying a plurality of sorted substrates in a conveying cassette into a chamber. CONSTITUTION: A glove box(102) excludes an oxygen and water. An automatic sorter(101) is installed at an inside of the glove box(102). An alignment device is installed adjacent to a load lock(104). A shadow mask and an ITO glass substrate(103) are sorted and conveyed to the load lock(104). A vacuum sealing processor(105) and a gate valve are installed between the glove box(102) and the load lock(104) to maintain process conditions. A cassette holder(108) and a cassette(107) are installed at an inside of the glove box(102) and perform up/down and rotating motions. An alignment conveyer(109) conveys each substrate from a sorter to the cassette(107). The alignment conveyer(109) includes two robot arms(112,113).