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发明名称
摘要
申请公布号	JP3292990(B2)	申请公布日期	2002.06.17
申请号	JP19910206234	申请日期	1991.07.24
申请人		发明人
分类号	G01D18/00;G01M11/00;G01N21/88;G01N21/93;G01N21/956;G01R31/316;G02F1/13;G06F11/24;G09G3/00;H01L29/78;H01L29/786;(IPC1-7):G01M11/00	主分类号	G01D18/00
代理机构		代理人
主权项
地址

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