| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an appearance inspection device capable of reducing the influence of vibration in the appearance inspection, and preventing the occurrence of a pseudo defect. SOLUTION: A recessed part 3a is formed on the upper surface of a surface plate 3, and an XY stage 2 is installed on the surface plate 3 across the recessed part 3a, and an opening part 22d is formed on a table 22c of the XY stage 2, and a photomask 1 which is an inspection object is loaded so as to cover the opening part 22d. A laser microscope including an objective lens 5 and a laser head 6 is installed on the surface plate 3, and the laser microscope is arranged on roughly the same horizontal plane as the XY stage 2, and the objective lens 5 is arranged on the bottom surface of the recessed part 3a of the surface plate 3 so as to be faced to the under surface of the photomask 1 through the opening part 22d.</p> |
