COMPOSITIONS FOR INSULATOR AND METAL CMP AND METHODS RELATING THERETO,申请号EP20000955837-传众专利搜索

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发明名称	COMPOSITIONS FOR INSULATOR AND METAL CMP AND METHODS RELATING THERETO
摘要
申请公布号	EP1210395(A1)	申请公布日期	2002.06.05
申请号	EP20000955837	申请日期	2000.08.23
申请人	RODEL HOLDINGS, INC.	发明人	COSTAS, WESLEY, D.;SHEN, JAMES;MANDIGO, GLENN, C.;THOMAS, TERENCE, M.;LACK, CRAIG, D.;BARKER, ROSS, E., II
分类号	B24B57/02;B24B37/00;C09G1/02;C09K3/14;H01L21/02;H01L21/304;H01L21/306;H01L21/3105;H01L21/321;(IPC1-7):C09K3/14;H01L21/302	主分类号	B24B57/02
代理机构		代理人
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