发明名称 Test head connection unit
摘要 Inconvenience that an auto-handler is not normally operated which is caused when an operator forgets the fixation between a test head and the auto-handler is solved. Sensors detect whether a measuring box is in a given connection height or not and also in a connection completion position relative to the auto-handler or not and decision result output means outputs the result of decision, so that the fixation between the test head and the auto-handler can be confirmed.
申请公布号 US2002063558(A1) 申请公布日期 2002.05.30
申请号 US20010995229 申请日期 2001.11.27
申请人 TAKEUCHI HIDEKI;OKAMOTO KAZUMI 发明人 TAKEUCHI HIDEKI;OKAMOTO KAZUMI
分类号 G01R31/26;G01R1/073;G01R31/01;G01R31/28;H01L21/66;(IPC1-7):G01R1/00;G01R31/02 主分类号 G01R31/26
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