发明名称 |
Test head connection unit |
摘要 |
Inconvenience that an auto-handler is not normally operated which is caused when an operator forgets the fixation between a test head and the auto-handler is solved. Sensors detect whether a measuring box is in a given connection height or not and also in a connection completion position relative to the auto-handler or not and decision result output means outputs the result of decision, so that the fixation between the test head and the auto-handler can be confirmed.
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申请公布号 |
US2002063558(A1) |
申请公布日期 |
2002.05.30 |
申请号 |
US20010995229 |
申请日期 |
2001.11.27 |
申请人 |
TAKEUCHI HIDEKI;OKAMOTO KAZUMI |
发明人 |
TAKEUCHI HIDEKI;OKAMOTO KAZUMI |
分类号 |
G01R31/26;G01R1/073;G01R31/01;G01R31/28;H01L21/66;(IPC1-7):G01R1/00;G01R31/02 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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