| 摘要 |
PROBLEM TO BE SOLVED: To eliminate a need for a mechanical shutter from a back surface irradiation type image pickup device by improving the energy-ray detecting efficiency and smear generation of the device. SOLUTION: In this image pickup device, a charge storing section (17) is formed on the second face side of a double-face structure to face a charge transferring section (13) formed on the first face side of the structure. On the second face side of the storing section (17), a depletion inhibiting layer (18) is provided. The storing section (17) improves the energy-ray detecting efficiency and smear generation of the device by shortening the diffusing distance of signal charges. The depletion inhibiting layer (18) suppresses the occurrence of dark currents on the second surface side. The image picking-up quality of the device is further improved, by discharging reactive charges via the charge transferring section (13), while the storing section (17) stores charges. In addition, the blooming phenomenon of the device is improved by discharging excessive charges overflowing the brim of the storing section (17) through the transferring section (13). In a method of manufacturing this image pickup device, the alignment accuracy of the double-face structure is improved, by forming datum references on both faces, based on one alignment mark.
|
