| 摘要 |
PROBLEM TO BE SOLVED: To provide a bonder in which displacement of an oscillating lever can be detected stably by detecting the displacement of a vertical driver. SOLUTION: The bonder comprises an oscillating lever 12 for moving a bump electrode forming wire 1 up and down, a vertical driver 14 fixed to the oscillating lever 12 and oscillating it to move up and down, and a sensor 20 for detecting displacement of the oscillating lever 12. The displacement sensor 20 has a scale 20a fixed to the end part 14c of a coil 14b in the vertical driver 14 so that displacement of the oscillating lever 12 is detected by detecting displacement of the vertical driver 14. Displacement of the oscillating lever 12 can be detected stably because it is not detected from a rotary shaft 15 but by detecting displacement of the vertical driver 14 integrated with the oscillating lever 12. |
