发明名称 |
CARBON THIN BODY, METHOD FOR FORMING CARBON THIN BODY, AND FIELD-EMISSION-TYPE ELECTRON SOURCE |
摘要 |
PROBLEM TO BE SOLVED: To provide a carbon thin body having a structure with which a planar electron source can be manufactured by a simple method, a method for manufacturing the carbon thin body, and a field-emission-type electron source using the carbon thin body. SOLUTION: The carbon thin body 9 is the one in a thin-film state having prescribed thickness t and also having surface and rear surface. Moreover, curved walls 3 are interconnected to form a nearly network structure at least in the part on the surface side 3c from the plane view. |
申请公布号 |
JP2002146533(A) |
申请公布日期 |
2002.05.22 |
申请号 |
JP20000337203 |
申请日期 |
2000.11.06 |
申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
HOSONO AKIHIKO;NAKADA SHUHEI;KAI MASAAKI |
分类号 |
C01B31/02;C03C17/22;C23C16/26;C23C16/511;H01J1/30;H01J1/304;H01J9/02 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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