发明名称 CARBON THIN BODY, METHOD FOR FORMING CARBON THIN BODY, AND FIELD-EMISSION-TYPE ELECTRON SOURCE
摘要 PROBLEM TO BE SOLVED: To provide a carbon thin body having a structure with which a planar electron source can be manufactured by a simple method, a method for manufacturing the carbon thin body, and a field-emission-type electron source using the carbon thin body. SOLUTION: The carbon thin body 9 is the one in a thin-film state having prescribed thickness t and also having surface and rear surface. Moreover, curved walls 3 are interconnected to form a nearly network structure at least in the part on the surface side 3c from the plane view.
申请公布号 JP2002146533(A) 申请公布日期 2002.05.22
申请号 JP20000337203 申请日期 2000.11.06
申请人 MITSUBISHI ELECTRIC CORP 发明人 HOSONO AKIHIKO;NAKADA SHUHEI;KAI MASAAKI
分类号 C01B31/02;C03C17/22;C23C16/26;C23C16/511;H01J1/30;H01J1/304;H01J9/02 主分类号 C01B31/02
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