发明名称 DEVICE FOR DETECTING THREE-DIMENSIONAL ELECTROMAGNETIC RADIATION AND METHOD FOR MAKING SAME
摘要 The invention concerns a device for detecting electromagnetic radiation comprising at least a detecting circuit including a non-cooled thermal detector (4) and an associated reading circuit (2). The invention is characterised in that it comprises: a substrate (8) forming a vacuum cavity (10), wherein are arranged the thermal detector and the reading circuit; a window (3) transparent to the radiation, arranged above the cavity and closing same; closure means (12, 13) for hermetically fixing the window on the substrate; and electrical connection means (9) inserted in the window providing sealed connection between the detection circuit and the processing elements outside the cavity. The invention also concerns the method for making said device.
申请公布号 WO0239481(A2) 申请公布日期 2002.05.16
申请号 WO2001FR03422 申请日期 2001.11.06
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE;OUVRIER-BUFFET, JEAN-LOUIS;BISOTTO, SYLVETTE;CAPLET, STEPHANE 发明人 OUVRIER-BUFFET, JEAN-LOUIS;BISOTTO, SYLVETTE;CAPLET, STEPHANE
分类号 H01L21/60;H01L31/0203 主分类号 H01L21/60
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