发明名称 |
Plasma confinement shield |
摘要 |
Improvements of the shielding of the reactor chamber in a radio frequency (RF) reactor are realized by providing dressed edges on the apertures found in the shield. These improvements to the reactor chamber lead to decreased defect density on processed wafers and eliminate the need for frequent cleaning of the reactor chamber.
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申请公布号 |
US6387817(B1) |
申请公布日期 |
2002.05.14 |
申请号 |
US19990390181 |
申请日期 |
1999.09.07 |
申请人 |
AGERE SYSTEMS GUARDIAN CORP. |
发明人 |
BUCKFELLER JOSEPH W. |
分类号 |
C23C14/56;C23C16/44;H01J37/32;H01L21/00;(IPC1-7):H01L21/306 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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