CALIBRATION JIG AND CALIBRATION DEVICE FOR WAFER-POLISHING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a calibration jig and a calibration system for a wafer- polishing apparatus which can carry out the calibration easily and accurately. SOLUTION: A calibration jig 50 detects a pushing pressure of a carrier 24 and a pushing pressure of a retainer ring 28 individually with a carrier load-cell 58 and a retainer load-cell 60 respectively. The calibration is carried out automatically by a controller 42, according to the pressing pressures of the carrier 24 and retainer 28 detected by the calibration jig 50.