发明名称 Light modulator
摘要 A light modulator includes a semiconductor substrate having a main surface, a rear surface, and a grounding conductor on the rear surface. A wave guide section having a width is located on the semiconductor substrate. A bonding pad section on the semiconductor substrate is located adjacent to the wave guide section and an insulating layer covers the main surface of the semiconductor substrate. A portion of the insulating layer immediately opposite the bonding pad section includes a multiple layer structure of insulating films. An electrode opposite the bonding pad section is electrically connected to the wave guide section.
申请公布号 US6384955(B2) 申请公布日期 2002.05.07
申请号 US20010839120 申请日期 2001.04.23
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 TADA HITOSHI;KADOWAKI TOMOKO
分类号 G02F1/025;(IPC1-7):G02F1/03;G02B6/12;H01L21/00 主分类号 G02F1/025
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