发明名称 |
Light modulator |
摘要 |
A light modulator includes a semiconductor substrate having a main surface, a rear surface, and a grounding conductor on the rear surface. A wave guide section having a width is located on the semiconductor substrate. A bonding pad section on the semiconductor substrate is located adjacent to the wave guide section and an insulating layer covers the main surface of the semiconductor substrate. A portion of the insulating layer immediately opposite the bonding pad section includes a multiple layer structure of insulating films. An electrode opposite the bonding pad section is electrically connected to the wave guide section.
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申请公布号 |
US6384955(B2) |
申请公布日期 |
2002.05.07 |
申请号 |
US20010839120 |
申请日期 |
2001.04.23 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
TADA HITOSHI;KADOWAKI TOMOKO |
分类号 |
G02F1/025;(IPC1-7):G02F1/03;G02B6/12;H01L21/00 |
主分类号 |
G02F1/025 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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