| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination optical device, which can appropriately suppress the decreased uniformity of illumination distribution due to speckled interference fringes, even if the number of divided wave fronts is increased for example. SOLUTION: This illumination optical device is provided with a light source means (1) for supplying a coherent light, a multiple light source forming means (5) for forming a number of light sources on the basis of light fluxed from the light source means (1), and light guiding optical systems (7, 9, and 11) for leading the light fluxes from the light source to surface (10) and (12) to be irradiated. In addition, it is also provided with a means (51) for giving a phase difference that gives a specified phase difference between a first group of light fluxes, forming a first group of light source and a second group of light fluxes forming a second group of light source among the light sources.
|
