| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for testing a semiconductor device which does not require waiting for some time for changing temperature, namely, can avoid long waiting time, and which does not require expensive modification of the apparatus for testing a variety of semiconductor devices. SOLUTION: This apparatus is provide with a tunable light source (4), which can irradiate a semiconductor device (3) with a light of a specific wavelength (λ) and of specific intensity (I) for a specific time duration (T). By irradiating the semiconductor device with the light, electrons can transfer from the valence band to the conduction in a semiconductor device having defects in which the distance in energy from the valence band to the conduction band is shorter than the normal value. By utilizing this phenomenon, a semiconductor device having defects can be detected.
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