发明名称 PRECISION BOARD STORING VESSEL
摘要 PROBLEM TO BE SOLVED: To provide a precision board storing vessel, capable of performing cleaning or the like by a cleaning apparatus, without causing delays in drying and lowering of workability and suppressing the risk of particles being left or the like and the contamination of a precision board. SOLUTION: A flange 10 extending upward is protruded in the neighborhood of the upper end face of the peripheral wall of a vessel body 1 arranging and storing a plurality of the precise boards through a cassette 3, a first rim 20 from the neighborhood of the terminal part of the flange 10 is protruded in the outward direction of the vessel body 1, a plurality of second rims 30, 31 are arranged in the outward direction of the vessel body 1 and protruded from the outer peripheral wall of the vessel body 1, the plurality of the second rims 30, 31 are positioned on the bottom face side of the vessel body 1 nearer than the first rim 20, the first and second rims 20, 30, 31 are molded to be slightly tapered respectively, and both the faces of the obverses and reverses are made to incline. Since cleaning water will not stay between the peripheral wall of the vessel body 1 and the first and second rims 20, 30, 31, drying working time is shortened, and workability and drying effect can be improved.
申请公布号 JP2002110775(A) 申请公布日期 2002.04.12
申请号 JP20000294818 申请日期 2000.09.27
申请人 SHIN ETSU POLYMER CO LTD 发明人 OHORI SHINICHI
分类号 B65D77/26;B65D85/86;B65G1/00;H01L21/304;H01L21/673;H01L21/68;(IPC1-7):H01L21/68 主分类号 B65D77/26
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