PELLICLE AND METHOD FOR ATTACHING PELLICLE

摘要

PROBLEM TO BE SOLVED: To provide a pellicle which can be surely and easily attached to a photomask without damaging a pellicle plate and to provide a method for attaching the pellicle. SOLUTION: The pellicle 11 has the pellicle plate 3 adhered to one end of a pellicle frame 15, and a photomask 7 is attached to the other end of the frame 15. The one end of the pellicle frame 15 has adhesion part for the pellicle plate where the pellicle plate 3 is adhered and has a part 15a to be pressed in the outside position of the outer circumference edge of the pellicle plate 3.