| 发明名称 |
SYSTEM AND METHOD FOR CONTROLLING MOVEMENT OF A WORKPIECE IN A THERMAL PROCESSING SYSTEM |
| 摘要 |
A system and method for processing a workpiece in a thermal processing furnace by measuring the temperature of the workpiece in the thermal processing furnace, and based upon an intended temperature profile and the measured temperature of the workpiece, moving the workpiece through the furnace to heat process the workpiece generally according to the intended temperature profile. |
| 申请公布号 |
WO0227059(A2) |
申请公布日期 |
2002.04.04 |
| 申请号 |
WO2001GB03806 |
申请日期 |
2001.08.24 |
| 申请人 |
AXCELIS TECHNOLOGIES, INC.;EATON LIMITED |
发明人 |
SHAJII, ALI;MATTHEWS, BRIAN;HEBB, JEFFREY, PAUL;DANIS, JOHN |
| 分类号 |
C23C16/52;C30B31/18;H01L21/00;H01L21/205;H01L21/26 |
主分类号 |
C23C16/52 |
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