| 摘要 |
A rotateable substrate support having a rotateable base and a plurality of end effectors coupled to the rotateable base, and adapted to support a substrate. Each end effector has a removable finger extending from the rotateable base and adapted to contact an edge of a substrate supported by the plurality of end effectors, and/or a removable pad, removably coupled to a finger, and positioned so as to contact an edge of a substrate supported by the plurality of end effectors.
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