发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having a MOS transistor of such a structure to guarantee the resistance to punch-through and to provide good characteristics with respect to reduction in leakage current, and also to provide a method of manufacturing the same. SOLUTION: In addition to an ordinary MOS transistor structure, this semiconductor device is provided with a channel doped region 1 which is formed in a prescribed depth nearly over the whole flat surface in a P well region 22 including a channel region. The maximum value of the P type impurity density MAXofP of the channel doped region 1 is set between 1×1018 and 1×1019, and is between 10% and 100% of the maximum value of the N type impurity density MAXofN of a source and drain region 31 (32), except for a region near the surface of the P well region 22.
申请公布号 JP2002083941(A) 申请公布日期 2002.03.22
申请号 JP20000270040 申请日期 2000.09.06
申请人 MITSUBISHI ELECTRIC CORP 发明人 UENO SHUICHI;HOTTA KATSUYUKI;KUROI TAKASHI
分类号 H01L21/265;H01L21/336;H01L21/8242;H01L27/108;H01L29/10;H01L29/78 主分类号 H01L21/265
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