发明名称 CONFOCAL POINT MICROSCOPE AND HEIGHT MEASURING METHOD USING THIS
摘要 <p>A confocal point microscope which applies an illuminating light beam to a sample via a confocal point disk providing a sectioning effect, and forms the image of a light beam from this sample on a photoelectric conversion means via the confocal point disk, and which comprises an object image forming optical system having an image forming lens for forming the image of the confocal point disk on the sample and a low-magnification object lens, and an image forming lens drive means for moving the image forming lens in an optical axis direction.</p>
申请公布号 WO2002023248(P1) 申请公布日期 2002.03.21
申请号 JP2001007868 申请日期 2001.09.11
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