发明名称 |
Process for coating amorphous carbon coating on to an x-ray target |
摘要 |
A method of manufacturing an x-ray target by positioning an x-ray target having an alloy surface and a graphite surface in a sputtering chamber. The x-ray target is then coated over the graphite surface with non-hydrogenated amorphous carbon.
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申请公布号 |
US2002034639(A1) |
申请公布日期 |
2002.03.21 |
申请号 |
US20010940054 |
申请日期 |
2001.08.27 |
申请人 |
MEARINI GERALD T.;CHEN HSIUNG;KUSNER ROBERT E.;TAKACS LASZLO A. |
发明人 |
MEARINI GERALD T.;CHEN HSIUNG;KUSNER ROBERT E.;TAKACS LASZLO A. |
分类号 |
H01J35/10;(IPC1-7):B32B9/00;C23C14/00 |
主分类号 |
H01J35/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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