发明名称 Process for coating amorphous carbon coating on to an x-ray target
摘要 A method of manufacturing an x-ray target by positioning an x-ray target having an alloy surface and a graphite surface in a sputtering chamber. The x-ray target is then coated over the graphite surface with non-hydrogenated amorphous carbon.
申请公布号 US2002034639(A1) 申请公布日期 2002.03.21
申请号 US20010940054 申请日期 2001.08.27
申请人 MEARINI GERALD T.;CHEN HSIUNG;KUSNER ROBERT E.;TAKACS LASZLO A. 发明人 MEARINI GERALD T.;CHEN HSIUNG;KUSNER ROBERT E.;TAKACS LASZLO A.
分类号 H01J35/10;(IPC1-7):B32B9/00;C23C14/00 主分类号 H01J35/10
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