| 摘要 |
PROBLEM TO BE SOLVED: To improve temperature shifting characteristics by controlling a varia tion in decreasing temperature rate for each zone and enlarging the whole decreasing temperature rate. SOLUTION: When the temperature of a heater 4 is decreased after a plurality of workpieces (W) supported at intervals in an arranged state are stored in a treatment container 3 and subjected to a prescribed treatment by heating with the cylindrical heater 4 around the treatment container 3, the inside of the heater 4 is separated into a plurality of zones and the temperature is detected. According to the detected temperature, a cooling air is fed more into a late decreasing temperature zone than a fast one so that the decreasing temperature rate of the late decreasing temperature zone is brought close to the fast one under control.
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