MULTI-LAYERED THIN FILM BATTERY INTEGRATED VERTICALLY AND PROCESS FOR PRODUCING THE SAME

摘要

PURPOSE: Provided is a multi-layered thin film battery integrated vertically, which is produced by using a unit thin film battery capable of performing two functions of a current collector and a protection membrane simultaneously and has high energy and high electric current in the least area. CONSTITUTION: The multi-layered thin film battery integrated vertically is produced by a process comprising the steps of: forming the unit thin film battery(10) on a substrate(1); spreading an insulating material on the unit thin film battery(10) and planarizing the insulating material by a CMP(chemical-mechanical polishing) method to form a planarized insulating membrane(11), wherein the insulating material is quartz, SiO2, SOG(spin-on-glass), and TEOS(tetra-ethyl ortho-silicate); etching the planarized insulating membrane(11) to make contact windows for a TiN layer(2c) of an anode current collector(2) and a Ti layer(6b) of a cathode current collector and forming metal plug-in(17, 18) by using metal such as W and Ti; forming a second unit thin film battery(10a) on the insulating membrane(11) and repeating the steps to form a multi-layered thin film battery.