发明名称 METHOD FOR PURIFYING FLUORINATED GAS EFFLUENTS
摘要 <p>The invention concerns a method which consists in contacting the gas effluents with a basic aqueous scrubbing solution containing a reducing agent maintaining the electrochemical potential of the solution at a value not more than -60 mV. The invention is useful for purifying gas effluents produced in the manufacture of semiconductor devices.</p>
申请公布号 WO2002016012(A1) 申请公布日期 2002.02.28
申请号 FR2001002667 申请日期 2001.08.24
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