发明名称 |
TRANSITION METAL DIELECTRIC ALLOY MATERIALS FOR MEMS |
摘要 |
Micromechanical devices are provided that are capable of movement due to a flexible portion. The micromechanical device can have a flexible portion (35) formed of a nitride of preferably an element from groups 3A to 6A of the periodic table (preferably from the first two rows of these groups) and a late transition metal (preferably from groups 8B or 1B of the periodic table). The micromechanical devices can be any device, particularly MEMS sensors or actuators preferably having a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or a micromirror part of an array for direct view and projection displays. The flexible portion is preferably formed by sputtering a target having a group 8B or 1B element and a group 3A to 6A element. The target can have other major consituents or impurities (e.g. additional group 3A to 6A element(s)). The target is reactively sputtered in a nitrogen ambient so as to result in a sputtered hinge. It is possible to form both stiff and/or flexible portions of the micromechanical device in this way.
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申请公布号 |
WO0216150(A1) |
申请公布日期 |
2002.02.28 |
申请号 |
WO2001US41872 |
申请日期 |
2001.08.23 |
申请人 |
REFLECTIVITY, INC.;REID, JASON, S. |
发明人 |
REID, JASON, S. |
分类号 |
B81B3/00;(IPC1-7):B44C1/22;H01L21/00 |
主分类号 |
B81B3/00 |
代理机构 |
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主权项 |
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