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发明名称
Method of manufacturing semiconductor devices having element separating regions
摘要
申请公布号
EP0660389(B1)
申请公布日期
2002.02.27
申请号
EP19940120685
申请日期
1994.12.27
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
MATSUOKA, FUMITOMO
分类号
H01L21/76;H01L21/308;H01L21/762;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
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