| 摘要 |
PROBLEM TO BE SOLVED: To provide a force/torque sensor capable of separately detecting each of stress components applied to a holding part. SOLUTION: There is provided the force/torque sensor according to an embodiment. The force/torque sensor includes a sensor base part formed of a thin film-shaped semiconductor, a strain-generating part set on a plane nearly even with the sensor base part and formed of a thin film-shaped semiconductor connected to the sensor base part, and the holding part set on a plane almost even with the strain-generating part and formed of a thin film-shaped semiconductor connected to the strain-generating part. The strain-generating part has a first, a second and a third strain-electric converting elements independently set for detecting a strain generated to the strain-generating part by stresses of different directions applied to the holding part.
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