Optical arrangement for producing light beams, e.g. for scanning microscopy, has correction device adaptive optical arrangement for radiation errors caused by deflector

摘要

The arrangement has a light source, preferably a laser, for generating a light beam, at least one acousto-optical deflector (3) for the light beam and a correction device for radiation errors caused by the deflector. The correction device has an adaptive optical arrangement (2), especially for correcting phase front errors. Independent claims are also included for the following: a method of deflecting light beams.