| 发明名称 |
PROBE DRIVING METHOD AND PROBE DEVICE |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To safely and efficiently bring a probe into contact with the surface of a sample by monitoring the height of the probe. SOLUTION: Information on the height of the probe from the surface of the sample is obtained by detecting the shadow 54 of the probe, which occurs immediately before being brought into contact with the sample or from changes in the relative locations of a probe image and a sample image formed when oblique irradiation with an ion beam is conducted.</p> |
| 申请公布号 |
JP2002040107(A) |
申请公布日期 |
2002.02.06 |
| 申请号 |
JP20000222882 |
申请日期 |
2000.07.24 |
| 申请人 |
HITACHI LTD;HITACHI ULSI SYSTEMS CO LTD |
发明人 |
TOMIMATSU SATOSHI;KOIKE HIDEMI;AZUMA JUNZO;ISHITANI TORU;SUGIMOTO ARITOSHI;HAMAMURA YUICHI;SEKIHARA TAKESHI;SHIMASE AKIRA |
| 分类号 |
G01N1/28;G01N1/32;G01N23/04;G01N23/225;G01Q10/00;G01Q30/02;G01Q30/04;G01Q30/20;G01Q60/44;G01R1/06;G01R31/28;G01R31/311;H01J37/28;H01L21/66;(IPC1-7):G01R31/28 |
主分类号 |
G01N1/28 |
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