| 发明名称 |
POLISHING PAD AND MANUFACTURING METHOD THEREFOR |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing pad capable of obtaining stable grinding performance. SOLUTION: A sheet including one and more kinds of abrasive grains is spirally wound in a cylindrical shape, and a cutting surface thereof is used as a grinding surface. |
| 申请公布号 |
JP2002036129(A) |
申请公布日期 |
2002.02.05 |
| 申请号 |
JP20000223541 |
申请日期 |
2000.07.25 |
| 申请人 |
ROKI TECHNO CO LTD |
发明人 |
TOMINAGA SHIGERU;SUZUKI MAKOTO |
| 分类号 |
B24B37/20;B24B37/22;B24D11/00;H01L21/304 |
主分类号 |
B24B37/20 |
| 代理机构 |
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