| 摘要 |
PROBLEM TO BE SOLVED: To improve the film quality of a diamond film. SOLUTION: A susceptor 31 is provided with plural recessed parts 33 in which bar-shaped metallic substrates 32 are inserted, also, the depth of the recessed part 33 is formed in such a manner that the upper part of the metallic substrate 32 is slightly exposed from the recessed part 33. By inserting the metallic substrate 32 into the recessed part 33 of the susceptor 31 in this way, the height of the metallic substrate 32 is made equivalent to that of the low state, so that an ideal diamond film can be deposited on the bar-shaped metallic substrate 32 having height by using a diamond film deposition system in a microwave plasma CVD method. Further, in the case the metallic substrate 32 is higher, it is possible that the susceptor 31 is pierced with a hole 34, and the metallic substrate 32a is inserted into the hole 34.
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