| 摘要 |
The invention provides a method of pre-inspecting an article prior to visual inspection thereof, the method comprising a step of detecting a defect signal based on a defect state of the inspection article, a step of generating detailed defect information based on the defect signal, and a step of visualizing, on the inspection article, the detailed defect information, and a device for pre-inspecting an article prior to visual inspection thereof, the device comprising means (103,104,105) for detecting a defect signal based on a defect state of the inspection article, means (107) for generating detailed defect information based on the defect signal, and means (106) for visualizing, on the inspection article, the detailed defect information. <IMAGE> |
