发明名称 CIRCUIT BOARD WITH CAPACITOR BUILT-IN AND METHOD FOR MANUFACTURING THE SAME AND SEMICONDUCTOR DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a circuit board with a thin film capacitor built-in with high manufacturing yield capable of preventing the increase of leakage currents or the deterioration of breakdown voltage even when reducing the film thickness of a dielectric layer, and to provide a method for manufacturing the circuit board. SOLUTION: A circuit board is equipped with a capacitor formed by sequentially laminating a first electrode layer, a dielectric layer constituted of at least one layer, and a second electrode layer on a base board. An insulating layer including at least one element constituting the first electrode layer is arranged between the pin hall part of the dielectric layer or/and the crystal grain boundary part of the dielectric layer and the first electrode. In this case, the first electrode layer is constituted of materials whose oxide indicates conductive characteristics in a state such that oxygen is insufficient, and turns to be an insulator according as it becomes close to stoichiometric composition.
申请公布号 JP2002026266(A) 申请公布日期 2002.01.25
申请号 JP20000206829 申请日期 2000.07.04
申请人 HITACHI LTD 发明人 MATSUZAKI EIJI;ISHIHARA SHOSAKU;ABE YOICHI;MATSUSHIMA NAOKI;SHIGI HIDETAKA
分类号 H05K1/09;H01G4/12;H01G4/33;H01L21/822;H01L27/04;H05K1/16;H05K3/38;(IPC1-7):H01L27/04 主分类号 H05K1/09
代理机构 代理人
主权项
地址