| 摘要 |
<p>A pressure sensor comprises a diaphragm (6) with a first pressure-sensitive surface, a first thermal detector (3) having a heat-sensitive resistor opposed to a central portion of the diaphragm with a spacer (7), and a second thermal detector having a heat-sensitive resistor opposed to a peripheral portion of the diaphragm where a pressure change causes little or no displacement. The first and second thermal sensors are connected to constant-current sources (23,28), respectively, which are independently controlled. A differential amplifier is connected to receive the voltage produced by the first sensor that detects the diaphragm displacement with a change in pressure as a change in thermal equilibrium and the voltage produced by the second sensor and being invariable with changes in pressure. This pressure sensor allows pressure measurements with high accuracy.</p> |
