Group III nitride compound semiconductor device and producing method therefore

摘要

A group III nitride compound semiconductor device has a substrate and an AlN single crystal layer formed on the substrate. The AlN single crystal layer has a thickness of from 0.5 to 3 mu m and has a substantially flat surface. The half-value width of an X-ray rocking curve of the AlN single crystal layer is not longer than 50 sec. In another device, a group III nitride compound semiconductor layer having a thickness of from 0.01 to 3.2 mu m is grown at a temperature of from 1000 to 1180 DEG C on a sapphire substrate having a surface nitride layer having a thickness of not larger than 300 ANGSTROM .