OPTICAL DISK, EXPOSURE DEVICE AND EXPOSURE METHOD

摘要

PROBLEM TO BE SOLVED: To provide an exposure device which can change the diameter of light spot at a sample which is irradiated with laser beams. SOLUTION: The exposure device 101 has a modulator 7 which modulates the laser beams of the parallel light beams from a laser device 4 in accordance with a modulation signal S17A, a convex lens 11 which is made incident with the laser beams from the modulator 7 and condenses the incident laser beams to a focus 11X, a zoom lens 12Z which is made incident with the laser beams past the focus 11X of the convex lens 11 and collimates the incident laser beam to the parallel light beams, an objective lens 52 which condenses the laser beams from the zoom lens 12Z to an optical disk 80 and actuators 12A and 13A which move the zoom lens 12Z in an optical axis direction while maintaining the focus of the zoom lens 12Z to a position of the focus 11X of the convex lens 11.