发明名称 SEMICONDUCTOR DEVICE HAVING DIFFERENT FIELD OXIDE SIZES
摘要 According to a semiconductor device of the present invention, a field oxide film is formed so as to cover the main surface of an SOI layer and to reach the main surface of a buried oxide film. As a result, a pMOS active region of the SOI and an nMOS active region of the SOI can be electrically isolated completely. Therefore, latchup can be prevented completely. As a result, it is possible to provide a semiconductor device using an SOI substrate which can implement high integration by eliminating reduction of the breakdown voltage between source and drain, which was a problem of a conventional SOI field effect transistor, as well as by efficiently disposing a body contact region, which hampers high integration, and a method of manufacturing the same.
申请公布号 US2002005552(A1) 申请公布日期 2002.01.17
申请号 US20000519598 申请日期 2000.03.06
申请人 INOUE YASUO;NISHIMURA TADASHI;YAMAGUCHI YASUO;IWAMATSU TOSHIAKI 发明人 INOUE YASUO;NISHIMURA TADASHI;YAMAGUCHI YASUO;IWAMATSU TOSHIAKI
分类号 H01L21/76;H01L21/8238;H01L21/84;H01L23/482;H01L27/092;H01L27/12;H01L29/78;H01L29/786;(IPC1-7):H01L27/01;H01L29/94 主分类号 H01L21/76
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