| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and its method requiring no pin to be brought into contact with circuit wiring in supply of an inspection signal to the circuit wiring and allowing detection of a minute defect indistinguishable by a naked eye. SOLUTION: The inspection device A for inspecting the circuit wiring in a circuit board 100 is constructed of a conductive member 1 arranged on one face side of the circuit board 100 for receiving a fed inspection signal, a signal source 2 supplying the inspection signal to the conductive member 1, a sensor unit 3 having a plurality of cells 3a arranged opposedly to the conductive member 1 on the other face side of the circuit board 100, and a computer 5 obtaining a signal appearing in each cell 3 when the inspection signal is fed to the conductive member 1. |
