| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive process to easily manufacture ultrafine powder silica having high specific surface area, <=5μm diameter corresponding to the size at 100% in the particle size distribution (D100) and no coarse particles. SOLUTION: A water-based slurry containing metal silicon powder is sprayed into a high temperature field while controlling the injection speed to at least >=20 m/s, and while the reaction product which passed the high temperature field is oxidized with a gas containing oxygen, the product is introduced into a collecting system to collect fine powder having <=5μm diameter corresponding to D100.
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