| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic transfer device which measures particles in the environment, where the device is disposed and a particle monitoring method thereof. SOLUTION: Plural inlets 12 are disposed in a casing 10, in which respective components performing the respective processes of magnetic transfer are disposed, particles are pulled out from the respective inlets 12 outside the casing 10 via resin tubes 21 and are connected with particle counters 14 and the particles are measured. The particles on the disposed position of the respective components which are disposed in the casing 10 are measured, and therefore, the source of generation, when the particles are generated, can be specified.
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