| 摘要 |
PROBLEM TO BE SOLVED: To provide a slide device with built-in a movable magnet type linear motor capable of further accurately positioning a table to a bed by further improving high speed operability and response of a slider to the bed. SOLUTION: An energization of the slide device 1 to an armature assembly 10 adopts a three-phase energization type, a drive circuit is thereby transferred from an interior of the slide device 1 to an external driver side to simplify a structure of the bed 2, and a height H can be lowered. As a field magnet 13, a rare earth magnet (neodymium magnet) is used, and hence its magnetic flux density is raised and a high thrust force is obtained at the table 3. An encoder for detecting a position of the table 3 adopts an optical encoder 14 having an optical linear scale 15, thereby improving its detecting accuracy. Since the detecting cable is disposed at a fixed side, this is suitable for a clean environment of low dusting.
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