摘要 |
<p>PROBLEM TO BE SOLVED: To provide a low-cost, high-performance acceleration sensor which is very effective, particularly when using frequencies near a resonant frequency fo, by achieving reduction in spurious radiation resulting from antiresonance dips by a simple structure. SOLUTION: This acceleration sensor 10 detects accelerations applied by voltages produced in a piezoelectric element 13 according to the vibration of a vibrating plate 12, by welding to a column 11a of a fixed case 11 in the vibrating plate 12 having the piezoelectric element 13 affixed thereto, and then enclosing the vibrating plate in a vibration space V defined by both the fixed case and a connection case 16. Distances L1 and L2 between the opposite faces of vibration spaces V1 and V2 defined between the bottom faces of the fixed case 11 and the connection case 16 and the respective front and back faces of the vibrating plate 12 and the vibrating body 19 of the piezoelectric element 13 are each set, equal to or less than 0.1 times an inside diameterϕA of each of the cases 11 and 16.</p> |