摘要 |
PROBLEM TO BE SOLVED: To provide a stamper manufacturing method comprising simple steps in each of which the deformation of a substrate is not caused and to provide a method for manufacturing an optical recording medium. SOLUTION: This stamper manufacturing method comprises a resist forming step to form a photoresist layer on a substrate consisting of a ferromagnetic body, an exposing step to expose the photoresist layer formed on the substrate, a developing step to develop the photoresist layer and an etching step to etch the substrate by using the photoresist layer as a mask pattern. The substrate is supported on a supporting plate by using magnetic force during the resist forming step, the exposing step and the developing step. |