发明名称 METHODS FOR MANUFACTURING STAMPER AND OPTICAL RECORDING MEDIUM, AND SUPPORTING PLATE
摘要 PROBLEM TO BE SOLVED: To provide a stamper manufacturing method comprising simple steps in each of which the deformation of a substrate is not caused and to provide a method for manufacturing an optical recording medium. SOLUTION: This stamper manufacturing method comprises a resist forming step to form a photoresist layer on a substrate consisting of a ferromagnetic body, an exposing step to expose the photoresist layer formed on the substrate, a developing step to develop the photoresist layer and an etching step to etch the substrate by using the photoresist layer as a mask pattern. The substrate is supported on a supporting plate by using magnetic force during the resist forming step, the exposing step and the developing step.
申请公布号 JP2001338445(A) 申请公布日期 2001.12.07
申请号 JP20000154787 申请日期 2000.05.25
申请人 NIPPON COLUMBIA CO LTD 发明人 NAKANO KAZUHIKO
分类号 G03F7/16;G03F7/20;G03F7/30;G11B7/26 主分类号 G03F7/16
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