| 摘要 |
A removal area EL is provided as a first dicing line in a dicing area, coat materials 6' and 7' are put on the flanks of the removal area, a resin layer R is formed, and a dicing blade narrower than the width of the removal area EL is used to fully cut on a second dicing line, whereby the interface exposed by the first dicing can be coated and protected.
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