| 摘要 |
PROBLEM TO BE SOLVED: To restrict oxidation and dispersion of a metallic substrate, and to increase a range of material selection for a substrate and a buffer layer. SOLUTION: A fabricating method of a high-temperature superconducting film is comprised of: a precursor fabrication step (step 1), in which a precursor is fabricated on a substrate by using a material to be an evaporation source; and a heat treatment step (step 2), in which a heat treatment is performed on the substrate on which a precursor has been fabricated to fabricate an oxide superconducting film. The material to be an evaporation source includes a fluoride. The heat treatment step is performed by setting a temperature of the substrate Tb of which range is 400 deg.C<=Tb<=750 deg.C, in a vacuum atmosphere, in which a total pressure P range is P<=10 mTorr (about 1.33 Pa) and a partial pressure range of oxygen Po is 0.1 mTorr (about 1.33×10-2 Pa)<=Po<=10 mTorr (about 1.33 Pa).
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