发明名称 Folded light tunnel apparatus and method
摘要 A folded light tunnel apparatus and method of providing light with a high degree of spatial uniformity in a compact arrangement. The light tunnel (100, 190, 300, 350) comprises plurality of prisms (110, 310) having a different cross-sectional dimension (W) and at least one beveled end (110E) having a corresponding beveled end face (110F) through which light reflected by the beveled end passes. The plurality of prisms are arranged adjacent one another in a either two-dimensional or three dimensional stack, with each beveled end face arranged adjacent another beveled end face such that light reflected from one beveled end is received by said adjacent beveled end face and coupled into the adjacent prism. The width of the prisms is governed by a scaling factor (K or K') that depends on whether the prism stack is two-dimensional or three-dimensional. Designing the light tunnel according to the scaling factor allows for the light tunnel to be theoretically 100% efficient in the transmission of light.
申请公布号 US6324330(B1) 申请公布日期 2001.11.27
申请号 US20000613012 申请日期 2000.07.10
申请人 ULTRATECH STEPPER, INC. 发明人 STITES DAVID G.
分类号 F21V8/00;G02B6/26;G02B6/42;G03F7/20;(IPC1-7):G02B6/00 主分类号 F21V8/00
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